Integrated 2D Mirror Devices:

Integrated 2D Mirror

Integrated Mirror Devices:

2D integrated MEMS Mirror
2D integrated MEMS Mirror
  • Mirror Sizes: 8mm, 1.2mm, 1.7mm, and 2.0mm diameter always in stock.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical
  • See support page for more info

Integrated Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Integrated mirror images and size guide showcasing various applications
Actuator NameMechanical Angle [°]Die Size [mm]Mirror Diameter [mm]PDF
A3I8.2-800AL±64.25 x 4.250.8
A7M8.1-800AL±4.755.20 x 5.200.8
A7M10.2-1000AL±4.755.20 x 5.201.0
A3I12.2-1200AL±54.25 x 4.251.2
F1M16.2-1600AL±4.55.20 x 5.201.6
A7M20.2-2000AL±55.20 x 5.202.0
A5M24.3-2400AL±5.57.25 x 7.252.4

*NR = Not Recommended