Comprehensive MEMS Datasheets and Guides: Everything You Need to Know

Datasheet and Guides

Description of Mirrorcle Tech Devices

MirrocleTech Micromirror Development Kit User Guides

Integrated Mirror Devices:

Integrated MEMS Mirror
Integrated MEMS Mirror
  • Mirror Sizes: 8mm, 1.2mm, 1.7mm, and 2.0mm diameter always in stock.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical
  • See support page for more info

Integrated Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Actuator Name

Mechanical Angle [°] Die Size [mm] Mirror Diameter [mm] PDF

A3I8.2-800AL

±6

4.25 x 4.25

0.8

A3I12.2-1200AL

±5

4.25 x 4.25

1.2

A7M20.2-2000AL

±4.8

5.20 x5.20

2.0

A5M24.2-2400AL

±5

7.25 x 7.25

2.4

A7M8.1-800AL

±4.75

5.20 x 5.20

0.8

A7M10.2-1000AL

±5

5.20 x 5.20

1.0

*NR = Not Recommended

Bonded Mirror Devices:

  • Bonded Mirror Sizes: 2.0mm,  2.4mm, 3.0mm, 3.6mm, 4.2mm, 4.6mm, 5.0mm, 6.4mm, and  7.5mm diameter in stock, larger possible in special orders.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical, varies with design type.
Bonded MEMS Mirrors
Bonded MEMS Mirrors

Bonded Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Actuator Name

Mechanical Angle [°]

Die Size [mm]

Mirror Diameter [mm]

2.0

2.4

3.0

3.6

4.2

4.6

5.0

6.4

7.5

A7B1.1

±7

5.20 x5.20

NR

NR

NR

NR

NR

A7B2.1

±5.5

5.20 x5.20

NR

NR

NR

NR

NR

NR

A8L2.2

±5

7.25 x 7.25

NR

NR

NR

NR

A5L3.3(C2)

±4.25

7.25 x 7.25

NR

NR

A5L3.3(C1)

±2.5

7.25 x 7.25

NR

A5L2.2

±1

7.25 x 7.25

See Product Listing and Guide (PDF Download)
Packaging Options:

DIP24 packages are available in package-only form. All other packages are available in connectorized TinyPCB form. For more information about these options, please see this document, Mirrorcle MEMS Packages and Mounts Guide (PDF).

Available Window Types

Type A : Fused Silica, 0.5mm thick, 400nm – 675nm double-sided AR coating, AOI 22.5°
Type B : Fused Silica, 0.5mm thick, 675nm – 1040nm double-sided AR coating, AOI 22.5°
Type C : Fused Silica, 0.5mm thick, 1040nm – 1600nm double-sided AR coating, AOI 22.5


“SensLite represents Mirrorcle products in Taiwan local market only, please contact memsmirror@senslite.com.tw for inquiry in Taiwan.

Please visit www.Mirrorcletech.com for other global sales.”