Bonded 2D MEMS Mirrors

Large diameter size MEMS Mirror

Bonded Mirror Devices:

  • Bonded Mirror Sizes: 2.0mm,  2.4mm, 3.0mm, 3.6mm, 4.2mm, 4.6mm, 5.0mm, 6.4mm, and  7.5mm diameter in stock, larger possible in special orders.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical, varies with design type.
Lidar MEMS Mirrors
LiDAR MEMS Mirrors

1Bonded Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Bonded mirror images and size guide showcasing various applications
ntegrated mirror images and size guide showcasing various applications
Actuator NameMechanical Angle [°]Die Size [mm]Mirror Diameter [mm]
  2.02.43.03.64.24.65.06.47.5
A7B1.3±75.20 x 5.20NRNRNRNRNR
A7B2.3±65.20 x 5.20NRNRNRNRNRNR
A8L2.2±57.25 x 7.25NRNRNRNR
A5L3.3(C2)±4.257.25 x 7.25NR
A5L3.3±2.57.25 x 7.25NR
A5L2.2±1.157.25 x 7.25

* = Datasheet Not Available
* NR = Not Recommended

See Product Listing and Guide (PDF Download)