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Datasheet and Guides

Datasheet and Guides

Description of Mirrorcle Tech Devices

MirrocleTech Micromirror Development Kit User Guides

Integrated Mirror Devices:

Integrated MEMS Mirror by MTI
Integrated MEMS Mirrors
  • Mirror Sizes: 8mm, 1.2mm, 1.7mm, and 2.0mm diameter always in stock.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical
  • See support page for more info

Integrated Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Actuator Name

Mechanical Angle [°] Die Size [mm] Mirror Diameter [mm] PDF

A3I8.2-800AL

±6

4.25 x 4.25

0.8

A3I12.2-1200AL

±5

4.25 x 4.25

1.2

A7M20.2-2000AL

±4.8

5.20 x5.20

2.0

A5M24.2-2400AL

±5

7.25 x 7.25

2.4

A7M8.1-800AL

±4.75

5.20 x 5.20

0.8

A7M10.2-1000AL

±5

5.20 x 5.20

1.0

*NR = Not Recommended

Bonded Mirror Devices:

  • Bonded Mirror Sizes: 2.0mm,  2.4mm, 3.0mm, 3.6mm, 4.2mm, 4.6mm, 5.0mm, 6.4mm, and  7.5mm diameter in stock, larger possible in special orders.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical, varies with design type.

Large 2D MEMS Mirrors (6.4mm, 7.5mm, 8.0mm)

Bonded Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Actuator Name

Mechanical Angle [°]

Die Size [mm]

Mirror Diameter [mm]

2.0

2.4

3.0

3.6

4.2

4.6

5.0

6.4

7.5

A7B1.1

±7

5.20 x5.20

NR

NR

NR

NR

NR

A7B2.1

±5.5

5.20 x5.20

NR

NR

NR

NR

NR

NR

A8L2.2

±5

7.25 x 7.25

NR

NR

NR

NR

A5L3.3(C2)

±4.25

7.25 x 7.25

NR

NR

A5L3.3(C1)

±2.5

7.25 x 7.25

NR

A5L2.2

±1

7.25 x 7.25

See Product Listing and Guide (PDF Download)

 

 

Packaging Options:

DIP24 packages are available in package-only form. All other packages are available in connectorized TinyPCB form. For more information about these options, please see this document, Mirrorcle MEMS Packages and Mounts Guide (PDF).

Options matching 4.2mm x 4.2mm actuators – DIP24-025, TINY20.4

Options matching 5.2mm x 5.2mm actuators – DIP24-025, TINY20.4

Options matching 7mm x 7mm actuators – DIP24-031, TINY48.4

Options matching 8mm x 8mm actuators – DIP24-038, TINY48.4

 
Available Window Types

Type A : Fused Silica, 0.5mm thick, 400nm – 675nm double-sided AR coating, AOI 22.5°
Type B : Fused Silica, 0.5mm thick, 675nm – 1040nm double-sided AR coating, AOI 22.5°
Type C : Fused Silica, 0.5mm thick, 1040nm – 1600nm double-sided AR coating, AOI 22.5

 

 

 

 

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