Large 2D MEMS Mirrors (6.4mm, 7.5mm, 8.0mm)

Features and Specifications:

• Gimbal-less Dual Axis MEMS Mirror
• Mech. Angle: ±1°
• Q-Factor: 35-50
• Drive Voltage: 0-180V
• Connectorized Package: TINY48.4 (20mm x 15mm)

Description:

The new A5L2 actuator is based on an established robust two-axis MEMS design which supports extra large bonded mirror sizes in small angle (±1°) beam steering. Previous versions of the design were named 13L2.x were manufactured at our UC Berkeley facility and were popular with many extra large-mirror customers. As a consequence of increases in orders, we transitioned the manufacture to our serial production line (manufacturing partner in Asia) and name it A5L2.

6.4mm Mirror, Aluminum Coated

• 1st Resonant Frequency: ~700-800 Hz
• Part Name: A5L2.1-6400AL-TINY48.4

7.5mm Mirror, Aluminum Coated

• 1st Resonant Frequency: ~500-550 Hz
• Part Name: A5L2.1-7500AL-TINY48.4

Target Applications:

• Free Space Optical Communications
• Solid State LiDAR
• Q-Switch
• Biomedical Imaging
• Eye Tracking