High Speed Point-To-Point Optical Beam Scanning MTI 2D MEMS Mirror 
The major advantage of MTI proprietary gimbal-less design is the capability to scan optical beams at equally high speeds in both axes. A typical device with a 0.8 mm diameter-sized micromirror achieves angular beam scanning of up to 500 rad/s and has first resonant frequency in both axes at approximately 4 kHz. Large angle step response settling times of <100 µs have been demonstrated on devices with micromirrors up to 0.8 mm in diameter. Devices with 2.0mm diameter mirrors can achieve large angle step settling times of <1ms, with first resonance of approximately 1.3 kHz.