Two Gimbal-less Dual-Axis Small Size MEMS Mirrors optimized for LIDAR & Imaging Applications
2D LiDAR / 3D LiDAR Development kit is a perfect set for developers of monostatic-type (coaxial) solid-state LiDARs. Mirrors with capability of extremely repeatable 2D scans with hundreds of lines/s can be easily programmed in a variety of raster patterns or point-to-point patterns. MEMS mirrors size from 1.0 mm up to 7.5mm is available as an option with the LiDAR development kit. MEMS selection as below:
| Actuator Name | Mechanical Angle [°] | Die Size [mm] | Mirror Diameter [mm] | |
|---|---|---|---|---|
| A3I8.2-800AL | ±6 | 4.25 x 4.25 | 0.8 | ✓ |
| A7M8.1-800AL | ±4.75 | 5.20 x 5.20 | 0.8 | ✓ |
| A7M10.2-1000AL | ±4.75 | 5.20 x 5.20 | 1.0 | ✓ |
| A3I12.2-1200AL | ±5 | 4.25 x 4.25 | 1.2 | ✓ |
| F1M16.2-1600AL | ±4.5 | 5.20 x 5.20 | 1.6 | ✓ |
| A7M20.2-2000AL | ±5 | 5.20 x 5.20 | 2.0 | ✓ |
| A5M24.3-2400AL | ±5 | 7.25 x 7.25 | 2.4 | ✓ |
| Actuator Name | Mechanical Angle [°] | Die Size [mm] | Mirror Diameter [mm] | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 2.0 | 2.4 | 3.0 | 3.6 | 4.2 | 4.6 | 5.0 | 6.4 | 7.5 | |||
| A7B1.1 | ±7 | 5.20 x 5.20 | ✓ | ✓ | ✓ | ✓ | NR | NR | NR | NR | NR |
| A7B2.1 | ±5.5 | 5.20 x 5.20 | NR | ✓ | ✓ | ✓ | NR | NR | NR | NR | NR |
| A8L2.2 | ±5 | 7.25 x 7.25 | NR | NR | ✓ | ✓ | ✓ | ✓ | ✓ | NR | NR |
| A5L3.3(C2) | ±4.25 | 7.25 x 7.25 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | NR | NR |
| A5L3.3(C1) | ±2.5 | 7.25 x 7.25 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | NR |
| A5L2.2 | ±1.15 | 7.25 x 7.25 | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ | ✓ |
When combined with user’s own ToF or FMCW receiver, they offer a very short route to a complete LiDAR reference design / prototype system. Similarly developers of biomedical imaging (OCT and other modalities) systems will find these a perfect fit.
In the LiDAR / Imaging Development Kit, there are three individual mirrors included with gold coating. Each mirror device is packaged in a connectorized package TINY20.4/TINY48.4 for easy handling, bread-boarding and connection to the USB MEMS Controller.
Products List Guide (PDF download)
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