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2018 MEMS Mirrors Datasheet and Guide

2018 Datasheet and Guides

2D MEMS integrated Point-to-point Mirror
2D MEMS integrated Point-to-point Mirror

 

Integrated Mirror Devices:

  • Mirror Sizes:8 mm, 1.2mm, 1.7mm, and 2.0mm diameter always in stock.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical
  • See support page for more info

 

Integrated Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Actuator Name Mechanical Angle [°] Die Size [mm] Mirror Diameter [mm] PDF
A3I8.2-800AL ±6 4.25 x 4.25 0.8 ✓
A3I12.2-1200AL ±5 4.25 x 4.25 1.2 ✓
A7M20.1-2000AL ±5 5.20 x 5.20 2 ✓
A5M24.1-2400AL ±5 7.25 x 7.25 2.4 ✓
A7M8.1-800AL ±4.75 5.20 x 5.20 0.8 ✓
Large 2D MEMS Mirrors (6.4mm, 7.5mm, 8.0mm)
Large 2D MEMS Mirrors (6.4mm, 7.5mm)

 

Bonded Mirror Devices:

  • Bonded Mirror Sizes: 2.0mm,  2.4mm, 3.0mm, 3.6mm, 4.2mm, 4.6mm, 5.0mm, 6.4mm, and  7.5mmmm diameter in stock, larger possible in special orders.
  • Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type.
  • Maximum tilt angle under resonant driving: -7° to +7° mechanical, varies with design type.
  • See support page for more info

Bonded Mirrors (Click on the ✓ symbol to view a sample datasheet, PDF)

Actuator Name Mechanical
Angle [°]		 Die Size
[mm]		 Mirror Diameter [mm]
2.0 2.4 3.0 3.6 4.2 4.6 5.0 6.4 7.5
A7B1.1 ±7 5.20 x 5.20 ✓ ✓ ✓ ✓ NR NR NR NR NR
A7B2.2 ±5.5 5.20 x 5.20 NR ✓ ✓ ✓ NR NR NR NR NR
A8L1.1 ±6 7.25 x 7.25 NR ✓ ✓ ✓ ✓ NR NR NR NR
A8L2.2 ±5 7.25 x 7.25 NR NR NR ✓ ✓ ✓ ✓ NR NR
13Z2.1 ±2.5 7.26 x 7.26 ✓ ✓ ✓ ✓ ✓ ✓ ✓ NR NR
A5L2.1 ±1 7.25 x 7.25 ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓ ✓

*NR = Not Recommended

Packaging Options:

DIP24 packages are available in package-only form. All other packages are available in connectorized TinyPCB form. For more information about these options, please see this document, Mirrorcle MEMS Packages and Mounts Guide (PDF).

Options matching 4.2mm x 4.2mm actuators – DIP24-025, TINY20.4

Options matching 5.2mm x 5.2mm actuators – DIP24-025, TINY20.4

Options matching 7mm x 7mm actuators – DIP24-031, TINY48.4

Options matching 8mm x 8mm actuators – DIP24-038, TINY48.4

Available Window Types

Type A : Fused Silica, 0.5mm thick, 400nm – 675nm double-sided AR coating, AOI 22.5°
Type B : Fused Silica, 0.5mm thick, 675nm – 1040nm double-sided AR coating, AOI 22.5°
Type C : Fused Silica, 0.5mm thick, 1040nm – 1600nm double-sided AR coating, AOI 22.5