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MEMS Drivers

  • Mirrorcle MEMS Drivers

OEM* Solutions for driving MirrorcleTech MEMS:
(*provided as PCBs with no boxes or cables and require minimum order quanitites)

Mirrorcle Technologies Hardware Guide (PDF Download)
USB MEMS Controller    “USB-SL MZ

Mirrorcle-designed controller with a fast Microchip PIC32MZ MCU. Provides USB communication, driving for MEMS devices, synchronization with other systems, and programmable hardware filtering to avoid overshoot and ringing. Controller is USB bus-powered and provides power for the embedded MEMS driver and low-power peripherals. System can therefore run solely on a laptop powered by its battery. Interfacing with the Controller is provided by Windows applications and APIs (C++, Matlab, LabView), as shown in many SDK examples and executables included with the Mirrorcle Software Suite (sold separately). Limited MEMS driving functionality is also possible via serial terminal commands.

  • 4x (16-bit) (0-200V) Analog Outputs for X and Y axis control of MEMS mirrors
  • Programmable hardware-based low-pass filters and protection circuitry to reduce the chances of device damage
  • Output bandwidth from 50Hz to 25kHz (governed by programmable low pass filters)
  • 8x Correlated Digital Ouputs (3.3V logic) for controlling other components or systems
  • Sample Rates up to 120,000 samples per second (120 kSPS)
  • 500kB of Onboard RAM allows up to 100,000 samples to be stored
  • 2x (12-bit) Analog Inputs with +/- 10V input range
  • Flash Memory allows storage of settings and data for stand-alone operation (no PC)
  • Sync Port for synchronization with additional Controllers or driving of laser peripherals
  • USB Plug and Play support
  • Separate Analog Input Port for a laser tracking photosensor (with laser tracking bundle purchase)
  • Wireless Option (Add-On purchase) allows battery-run wireless operation over Bluetooth
OCCIE1.x Controller
 The OCCIE 1.1 controller interfaces with Windows Applications for Scan Control and software command that results in MEMS mirror scans and repeatable patterns.
  • This product is available with 1k/month volumes, with a 3 month lead time, and is mass production line ready

Features and Specifications:

  • USB Powered MEMS Controller: OCCIE 1.1
  • <800mW Power Consumption
  • Host Connector with 2 Analog Inputs
  • Host Connector with 4 Digital Synchronization Outputs
  • Digital Output connector with 8 Digital Outputs
  • Minimum order quantity, Provided without box and cables in production quantities
MEMS Driver – Digital Input       “PicoAmp 5.x
  • Each unit uses a serial 16-bit DAC to convert a serial digital stream (interface from user’s microcontroller or FPGA) to four channels (bias differential method) to drive MTI MEMS mirror devices to full angles. Wide bandwidth actuation. Also included is protection circuitry to reduce the chances of device damage. Safe operation further relies on the customer-provided clock signal for setting the cut-off frequency of on-board low-pass filters (that frequency should be set based on recommended value in each device datasheet). A DC supply voltage must also be provided on the input header.
  • INPUT: 10-pin header connector (0.05″, 2 rows, vertical) with SPI digital interface and other connections
  • OUTPUT: 10-pin header connector (0.05″, 2 rows, right angle) with four (4) channels of MEMS driving voltages between ~0V – 200V for capacitive MEMS loads (low current)
  • Includes a fast, 16-bit 4-channel DAC to convert a serial digital stream (interface from user’s microcontroller or FPGA) to four (4) built-in hardware Low-Pass-Filters
    • A clock waveform on the corresponding input pin is required to set the LPF cut-off
  • Powered by +5VDC (4.9V-5.1V) provided by user on input header connector with power consumption of ~75-85mW
MEMS Driver – Analog Input       “BDQ PicoAmp 5.x”
  • Takes two analog inputs from input header connector (specified below) and converts to four channels (bias-differential method) to drive MTI MEMS mirror devices to full angles. Wide bandwidth of actuation. Also included is protection circuitry to reduce the possibility of device damage. Safe operation further relies on the customer-provided clock signal for setting the cut-off frequency of on-board low-pass filters (that frequency should be set based on recommended value in each device datasheet). A dc supply voltage must also be provided on the input header.
  • INPUT: 10-pin header connector (0.05″, 2 rows, vertical) with analog input for X- and Y-axis (voltage range -10V to +10V, with 0V for origin), and other connections
  • OUTPUT: 10-pin header connector (0.05″, 2 rows, right angle) with four (4) channels of MEMS driving voltages for capacitive loads (low output currents)
    • B160 Option: Vbias = 80V, Range 0V – 160V
    • T180 Option: Vbias = 90V, Rnage 0V – 180V
    • X200 Option: Vbias = 100V, Range 0V – 200V
  • Includes four (4) built-in hardware Low-Pass-Filters
    • A clock waveform on the corresponding input pin is required to set the LPF cut-off
  • Powered by +5VDC (4.9V-5.1V) provided by user on input header connector with power consumption of ~75mW
Breakout PCBA for Input connector of MEMS Drivers, P/N: BRK-DRIVER-5.x
  • PCBA which breaks out the input connection side of both digital and analog-input MEMS driver to easy to use terminals or test points / pins. Each pin of the 10-pin connector has its own screw terminal connection and easy to read label. Recommended and prepared for first-time users of Mirrorcle’s MEMS Drivers. Typically a new user should purchase one of these PCBAs with the first purchase of a MEMS Driver 5.x.
  • INPUT: Screw terminals, test points, connect pins – multiple options for easy connections to the driver inputs.
  • OUTPUT: 10-pin header connector (0.05″, 2 rows, right angle) which can be directly connected to MEMS Drivers (Analog and Digital) of 5.x generations.


Detailed Descriptions and Helpful Downloads

Mirrorcle Technologies Hardware Guide (PDF Download)
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