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2D MEMS Laser Scanning Module

MEMS mirror scanning module with 40 ° Field of View (FoV) is designed for two axis collimated laser beam (or 2D optical) scanning applications.  An optical cell built-in with MEMS mirror with 2600 Hz Resonat Frequency and laser is special design for the applications that require miniature, high speed, long-term stability, lower power consumption and low cost solution. Plug-and-play compact design is suitable for all kinds of single mode laser beam-steering applications.
2D MEMS Scanning Module
2D MEMS Scanning Module


2D MEMS Scan module Datasheet (Download)
  • MirrorcleTech Gimbal-less MEMS designed  for high speed two-axis laser beam steering
  • Resonant Frequency X and Y at 2600 Hz
  • 40° Degree Optical Scanning angle (Field of View)
  • Large angles in point-to-point (quasi-static) or resonant  mode of operation
  • Robust compact design for long-term stability
  • Small form factor mass product ready
  • Standard Laser wavelength with 405nm, 450nm, 520nm, and 638nm.

(Others laser wavelength upon request)

  • Custom MEMS actuator with other speed upon request.
  • Custom-designed scanning module upon request.
  • Works with any Mirrorcle MEMS driver and MEMS controller
Scanning Module Type MEMS Package Product Code Dimension (LxWxH) (Unit: mm)
Multi-Color TO-8 EaZy3b.TT 44.8 x 21.4 x 16
Single Color LCC EaZy1b.LT 33 x 21.4 x 16
Single Color TO-8 EaZy1b.TT 32.3 x 21.4 x 16
Compact  Single Color TO-8 EaZy1c.TT.F 23 x 17.5 x 16
2D MEMS Scan module Datasheet (Download)

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Lidar and 3D Scan
3D metrology
Bio imaging
3D tracking/Scanning
Laser marking
Free space communication
Compact Laser Scanning Module
Compact Laser Scanning Module
RGB Full Color Laser Scanning module
RGB Full Color Laser Scanning module
520nm Laser Scanning Module
520nm Laser Scanning Module