We offer two distinct categories of devices based on mirror fabrication methodology:<\/p>\n
Integrated mirror<\/strong>: An integrated mirror is monolithic, fabricated as an integral part of the overall MEMS device\/actuator single-crystal silicon structure.\u00a0 The mirror is later selectively metalized. \u00a0It is often 40um thick. Only smaller mirrors are integrated, usually those that have e.g. 0.8mm, 1.2mm, and 1.7mm diameter.<\/p>\n Bonded mirror:\u00a0 <\/strong>A bonded mirror is fabricated separately from the MEMS device\/actuator and it is a single-crystal silicon structure with excellent optical properties which can be assembled into a MEMS actuator with tip\/tilt capabilities.\u00a0 There are two sub-categories possible through Mirrorcle\u2019s technology:<\/p>\n – Bonded mirror with no pedestal (no stand-off): The mirror is fabricated separately from the MEMS device\/actuator. These mirrors are thin, have low inertia, and offer good flatness. They are bonded to the MEMS-actuator, on top of the rotating stage. Usually only smaller mirrors up to 1.2mm can be assembled this way.<\/p>\n – Bonded mirror with pedestal (standing off above MEMS\/actuator): The mirror is fabricated separately. It is a thin plate with low inertia, but it is standing on top of a 0.3mm pedestal above the actuator. Mirror sizes of 2.0mm and larger are of this type.\u00a0 This methodology allows mirrors of e.g. 6.4mm diameter which practically completely cover the underlying actuator chip.<\/p>\n","protected":false},"excerpt":{"rendered":" We offer two distinct categories of devices based on mirror fabrication methodology: Integrated mirror: An integrated mirror is monolithic, fabricated as an integral part of the overall MEMS device\/actuator single-crystal silicon structure.\u00a0 The mirror is later selectively metalized. \u00a0It is often 40um thick. Only smaller mirrors are integrated, usually those that have e.g. 0.8mm, 1.2mm, […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[],"tags":[],"class_list":["post-4718","post","type-post","status-publish","format-standard","hentry"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/posts\/4718","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/comments?post=4718"}],"version-history":[{"count":1,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/posts\/4718\/revisions"}],"predecessor-version":[{"id":4719,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/posts\/4718\/revisions\/4719"}],"wp:attachment":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/media?parent=4718"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/categories?post=4718"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/tags?post=4718"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}