{"id":4073,"date":"2015-09-15T21:34:58","date_gmt":"2015-09-15T13:34:58","guid":{"rendered":"http:\/\/senslite.com.tw\/Home\/?page_id=4073"},"modified":"2021-10-08T02:20:05","modified_gmt":"2021-10-08T02:20:05","slug":"mirrocle-mems-mirrors","status":"publish","type":"page","link":"https:\/\/senslite.com.tw\/Home\/index.php\/mirrocle-mems-mirrors\/","title":{"rendered":"2D Mirrors"},"content":{"rendered":"\n<h2 class=\"wp-block-heading\">2D Mirrors<\/h2>\n\n\n<h6>World&#8217;s fastest and lowest power-consuming two-axis point-to-point<br \/>beam-steering mirrors designed by Mirrorcle Technologies, Inc.<\/h6>\n<figure id=\"attachment_5474\" aria-describedby=\"caption-attachment-5474\" style=\"width: 300px\" class=\"wp-caption alignright\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-5474 size-medium\" src=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-300x221.jpg\" alt=\"2D integrated MEMS Mirror\" width=\"300\" height=\"221\" srcset=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-300x221.jpg 300w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-100x74.jpg 100w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-275x202.jpg 275w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror.jpg 340w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-5474\" class=\"wp-caption-text\">2D integrated MEMS Mirror<\/figcaption><\/figure>\n<h5><a href=\"https:\/\/www.mirrorcletech.com\/pdf\/Mirrorcle_Products_List.pdf\">See Product Listing and Guide <\/a>(PDF Download)<\/h5>\n<h5>Features:<\/h5>\n<ul>\n<li>\n<h5>Dual-axis quasi-static <span style=\"color: #333333;\">(point to point) MEMS Mirrors<\/span><\/h5>\n<\/li>\n<li>\n<h5><span style=\"color: #333333;\">Flat high quality mirrors<\/span> up to 8.0 mm diameter<\/h5>\n<\/li>\n<li>\n<h5><span style=\"color: #333333;\">Plug and Play <\/span>Development Kits and <span style=\"color: #333333;\">OEM Drivers\/Controllers<\/span><\/h5>\n<\/li>\n<li>\n<h5><span style=\"color: #333333;\">Mass Production Ready Low-cost<\/span> compact MEMS scanning modules<\/h5>\n<\/li>\n<\/ul>\n<h4><a href=\"https:\/\/senslite.com.tw\/Home\/mems-mirrors\/applications\/\">Product Applications:<\/a><\/h4>\n<ul>\n<li>\n<h6>MEMS scanning <span style=\"color: #808080;\">LiDAR <\/span>systems<\/h6>\n<\/li>\n<li>\n<h6><span style=\"color: #808080;\">Laser marking<\/span> and <span style=\"color: #808080;\">3D printing <\/span>technology<\/h6>\n<\/li>\n<li>\n<h6><span style=\"color: #808080;\">MEMS Mirror-based Display<\/span> and <span style=\"color: #808080;\">Picoprojector<\/span> technology<\/h6>\n<\/li>\n<li>\n<h6><span style=\"color: #808080;\">3D Tracking <\/span>and Position Measurement<\/h6>\n<\/li>\n<li>\n<h6>Windshield <span style=\"color: #808080;\">Head-Up Display (HUD) <\/span>technology<\/h6>\n<\/li>\n<li>\n<h6><span style=\"color: #808080;\">3D Imaging<\/span> for Biomedical Imaging (Medical Research and Diagnosis)<\/h6>\n<\/li>\n<li>\n<h6><span style=\"color: #808080;\">3D Scanning Metrology<\/span><\/h6>\n<\/li>\n<li>\n<h6><span style=\"color: #808080;\">Automotive (Dynamic) Laser Headlights<\/span><\/h6>\n<\/li>\n<li>\n<h6><span style=\"color: #808080;\">AR\/VR <\/span>&#8211; wearable headsets and tracking systems<\/h6>\n<\/li>\n<\/ul>\n<h4 class=\"bold\">\u00a0MEMS Mirrors (Gimbal-less Two Axis MEMS Mirrors)<\/h4>\n<ul class=\"list\">\n<li>MEMS Mirrors type:\u00a0 Integrated Mirror or Bonded Mirror<\/li>\n<li>Gimbal-less design gives ultra-fast two-axis laser beam steering<\/li>\n<li>Large angles in point-to-point (quasi-static) or resonant mode of operation<\/li>\n<li>Variety of mirror sizes available in stock, from 0.8mm to 4.2mm (See Product Listing and Guide)<\/li>\n<\/ul>\n<h4>Gimbal-less Two Axis (Tip-Tilt) MEMS Mirrors<\/h4>\n<figure id=\"attachment_5492\" aria-describedby=\"caption-attachment-5492\" style=\"width: 300px\" class=\"wp-caption alignright\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-5492 size-medium\" src=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/semi_custom_2D_MEMS-300x196.jpg\" alt=\"Bonded MEMS Mirrors\" width=\"300\" height=\"196\" srcset=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/semi_custom_2D_MEMS-300x196.jpg 300w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/semi_custom_2D_MEMS-410x268.jpg 410w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/semi_custom_2D_MEMS-100x65.jpg 100w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/semi_custom_2D_MEMS-275x180.jpg 275w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/semi_custom_2D_MEMS.jpg 583w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-5492\" class=\"wp-caption-text\">Bonded MEMS Mirrors<\/figcaption><\/figure>\n<p>Scanning two axis (tip-tilt) MEMS mirror (or &#8220;micromirror&#8221;) is an optical beam-steering (or 2D optical scanning) technology that is used in many industries. There are several major benefits of the Mirrorcle&#8217;s tip-tilt MEMS mirror over competing products. Gimbal-less Two-Axis Scanning Micromirror Devices based on ARI-MEMS fabrication technology initially developed through research projects at the <a href=\"http:\/\/www.adriaticresearch.org\">Adriatic Research Institute (\u201cARI\u201d)<\/a> in Berkeley, CA, provide ultra low-power and very fast optical beam scanning in two-axes.\u00a0The devices deflect laser beams to optical scanning angles of up to 32\u00b0 at high speeds in both axes.\u00a0Compared to the large-scale galvanometer optical scanners, our devices require several orders of magnitude less driving power. Continuous full-speed operation of our electro-static actuators dissipates less than a few milliwatts of power.<\/p>\n<p>MirrorcleTech devices are made entirely of single-crystal silicon, resulting in excellent repeatability and reliability.\u00a0Optically flat and smooth mirrors are coated with a thin film with desired reflectivity.\u00a0Larger mirrors can be bonded onto actuators for custom aperture sizes. <a href=\"https:\/\/senslite.com.tw\/Home\/mems-mirrors\/datasheet-guides\/\">Mirror sizes<\/a> from 0.8mm to 4.2mm in diameter are currently available in stock. Sizes up to 9.0mm were successfully demonstrated in special applications. (<a href=\"https:\/\/www.youtube.com\/watch?v=LsS0Yfch_Z8\" target=\"_blank\" rel=\"noopener noreferrer\">see demonstrated on youtube)<\/a><\/p>\n<p>MirrorcleTech&#8217;s MEMS micromirror technology is highly versatile and adaptable to various applications. Some devices are fabricated with somewhat generic quasi-static (point-to-point) performance specifications. Other devices are highly customized to achieve specific set of specifications, such as e.g. projection-displays.<\/p>\n<h4>Key Benefits<\/h4>\n<h6 style=\"padding-left: 30px;\"><span style=\"color: #808080;\">The tilt angle is analog as opposed to on-off.<\/span><\/h6>\n<h6 style=\"padding-left: 30px;\">See <a href=\"https:\/\/www.youtube.com\/watch?v=UcT0ZIcL2B4\">video of tip-tilt-piston movement<\/a> under microscope.<\/h6>\n<p style=\"padding-left: 30px;\">This is the key differentiation with digital micromirror elements which can not be used for arbitrary-direction optical beam steering. In other words, if a tilt angle of 6.15\u00b0 is required, it is simply a matter of applying the correct voltage and that angle (or any other angle) can be obtained and maintained for any length of time with nearly zero power consumption.<\/p>\n<h6 style=\"padding-left: 30px;\"><span style=\"color: #808080;\">Point-To-Point Scanning<\/span><\/h6>\n<p style=\"padding-left: 30px;\">The devices are designed and optimized for point-to-point optical beam scanning mode of operation.\u00a0 A steady-state analog actuation voltage results in a steady-stage analog angle of rotation of the micromirror.\u00a0 There is a one-to-one correspondence of voltages and angles that is highly repeatable.<\/p>\n<h6 style=\"padding-left: 30px;\"><span style=\"color: #808080;\">Modular Design<\/span><\/h6>\n<p style=\"padding-left: 30px;\">In order to produce devices with a different mirror size, most technologies require not only a new fabrication cycle, but in some cases complete actuator redesign.\u00a0Mirrorcle Technologies is the world&#8217;s only provider of a MEMS based, customizable aperture size beam steering technology.\u00a0Namely, sets of electrostatic actuators optimized for speed, angle, area footprint or resonant driving are designed and realized in a self-aligned silicon fabrication process.\u00a0Metallized, ultra low-inertia single crystal mirrors made stiff and flat by a special design of silicon beams are created in a separate fabrication process.\u00a0The diameter, as well as geometry of the mirror is selected by customer, in order to optimize the trade-offs between speed, beam size, and scan angle for each individual application.\u00a0The mirrors are subsequently bonded to the actuators.A variety of gibmal-less two-axis actuator designs are available.\u00a0The actuators lend themselves inherently to a modular design approach.\u00a0Each actuator can utilize rotators of arbitrary length, arbitrarily stiff linkages, and arbitrarily positioned mechanical rotation transformers. In stock categories include 4.25mm x 4.25mm die size, 5.2mm x 5.2mm die size, 7.2mm x 7.2mm die size, and 8.0mm x 8.0mm die size. In most cases, larger die size allows better performance due to increased electrostatic force. Beyond die size other parameters are varied such as e.g. stiffness. One device series for example is designed to operate at large angles (-7.5\u00b0 to +7.5\u00b0 of mechanical tilt,) while another series is designed to operate at small tip-tilt angles but dramatically higher speeds (-0.8\u00b0 to +0.8\u00b0 of mechanical tilt).<\/p>\n<h6 style=\"padding-left: 30px;\"><span style=\"color: #808080;\">High Speed Point-To-Point Optical Beam Scanning<\/span><\/h6>\n<p style=\"padding-left: 30px;\">The major advantage of our proprietary gimbal-less design is the capability to scan optical beams at equally high speeds in both axes.\u00a0A typical device with a 0.8 mm diameter-sized micromirror achieves angular beam scanning of up to 500 rad\/s and has first resonant frequency in both axes at approximately 4 kHz.\u00a0Large angle step response settling times of &lt;100 \u00b5s have been demonstrated on devices with micromirrors up to 0.8 mm in diameter. Devices with 2.0mm diameter mirrors can achieve large angle step settling times of &lt;1ms, with first resonance of approximately 1.3 kHz.<\/p>\n<p style=\"padding-left: 30px;\">Devices can also operate in the dynamic, resonant mode.\u00a0In this mode, low actuation voltages at frequencies near resonance result in large bi-directional optical beam angles (e.g. -16\u00b0 to 16\u00b0).\u00a0 Resonant frequencies are in the range from several kHz up to 21 kHz and higher for MEMS display applications. Resonance depends on the actuator type (series,) and the micromirror type and diameter that is assembled with the actuator.<\/p>\n<h5><a href=\"https:\/\/www.mirrorcletech.com\/pdf\/Mirrorcle_Products_List.pdf\">See Product Listing and Guide<\/a> (PDF Download)<\/h5>\n<h4><strong>Integrated Mirror Devices:<\/strong><\/h4>\n<figure id=\"attachment_5474\" aria-describedby=\"caption-attachment-5474\" style=\"width: 300px\" class=\"wp-caption alignright\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-5474 size-medium\" src=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-300x221.jpg\" alt=\"2D integrated MEMS Mirror\" width=\"300\" height=\"221\" srcset=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-300x221.jpg 300w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-100x74.jpg 100w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror-275x202.jpg 275w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_integrated_Mirror.jpg 340w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-5474\" class=\"wp-caption-text\">2D integrated MEMS Mirror<\/figcaption><\/figure>\n<ul>\n<li>Mirror Sizes: 8mm, 1.2mm, 1.7mm, and 2.0mm diameter always in stock.<\/li>\n<li>Maximum tilt angle under point-to-point driving: -6\u00b0 to +6\u00b0 mechanical each axis, varies with design type.<\/li>\n<li>Maximum tilt angle under resonant driving: -7\u00b0 to +7\u00b0 mechanical<\/li>\n<li>See support page for more info<\/li>\n<\/ul>\n<p class=\"bold\" align=\"left\"><span class=\"bold\">Integrated Mirrors<\/span> (Click on the \u2713 symbol to view a sample datasheet, PDF)<\/p>\n<div class=\"divider-wrap\" data-alignment=\"default\">\n<div class=\"divider\">\u00a0<\/div>\n<\/div>\n<div id=\"\" class=\"wpb_text_column wpb_content_element \">\n<div class=\"wpb_wrapper\">\n<table id=\"tablepress-1\" class=\"tablepress tablepress-id-1\">\n<thead>\n<tr class=\"row-1 odd\">\n<th class=\"column-1\">Actuator Name<\/th>\n<th class=\"column-2\">Mechanical Angle [\u00b0]<\/th>\n<th class=\"column-3\">Die Size [mm]<\/th>\n<th class=\"column-4\">Mirror Diameter [mm]<\/th>\n<th class=\"column-5\">PDF<\/th>\n<\/tr>\n<\/thead>\n<tbody class=\"row-hover\">\n<tr class=\"row-2 even\">\n<td class=\"column-1\">A3I8.2-800AL<\/td>\n<td class=\"column-2\">\u00b16<\/td>\n<td class=\"column-3\">4.25 x 4.25<\/td>\n<td class=\"column-4\">0.8<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/integrated\/a3i8-2-800al\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<tr class=\"row-3 odd\">\n<td class=\"column-1\">A7M8.1-800AL<\/td>\n<td class=\"column-2\">\u00b14.75<\/td>\n<td class=\"column-3\">5.20 x 5.20<\/td>\n<td class=\"column-4\">0.8<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/integrated\/a7m8-1-800al\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<tr class=\"row-4 even\">\n<td class=\"column-1\">A7M10.2-1000AL<\/td>\n<td class=\"column-2\">\u00b14.75<\/td>\n<td class=\"column-3\">5.20 x 5.20<\/td>\n<td class=\"column-4\">1.0<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/integrated\/a7m10-2-1000al\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<tr class=\"row-5 odd\">\n<td class=\"column-1\">A3I12.2-1200AL<\/td>\n<td class=\"column-2\">\u00b15<\/td>\n<td class=\"column-3\">4.25 x 4.25<\/td>\n<td class=\"column-4\">1.2<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/integrated\/a3i12-2-1200al\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<tr class=\"row-6 even\">\n<td class=\"column-1\">F1M16.2-1600AL<\/td>\n<td class=\"column-2\">\u00b14.5<\/td>\n<td class=\"column-3\">5.20 x 5.20<\/td>\n<td class=\"column-4\">1.6<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/integrated\/f1m16-2-1600al\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<tr class=\"row-7 odd\">\n<td class=\"column-1\">A7M20.2-2000AL<\/td>\n<td class=\"column-2\">\u00b15<\/td>\n<td class=\"column-3\">5.20 x 5.20<\/td>\n<td class=\"column-4\">2.0<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/integrated\/a7m20-1-2000al-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<tr class=\"row-8 even\">\n<td class=\"column-1\">A5M24.3-2400AL<\/td>\n<td class=\"column-2\">\u00b15<\/td>\n<td class=\"column-3\">7.25 x 7.25<\/td>\n<td class=\"column-4\">2.4<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/integrated\/a5m24-3-2400al\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<p class=\"bold\" align=\"left\">*NR = Not Recommended<\/p>\n<h4><strong>Bonded Mirror Devices:<\/strong><\/h4>\n<ul>\n<li class=\"first-child\"><strong>Bonded Mirror Sizes:\u00a0<\/strong>2.0mm,\u00a0 2.4mm, 3.0mm, 3.6mm, 4.2mm, 4.6mm, 5.0mm, 6.4mm, and\u00a0 7.5mm diameter in stock, larger possible in special orders.<\/li>\n<li><strong>Maximum tilt angle under point-to-point driving:<\/strong> -6\u00b0 to +6\u00b0 mechanical on each axis, varies with design type.<\/li>\n<li><strong>Maximum tilt angle under resonant driving:<\/strong> -7\u00b0 to +7\u00b0 mechanical, varies with design type.<\/li>\n<\/ul>\n<figure id=\"attachment_5473\" aria-describedby=\"caption-attachment-5473\" style=\"width: 300px\" class=\"wp-caption alignright\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-5473 size-medium\" src=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_bonded_-Mirror-300x221.jpg\" alt=\"Gimbal-less MEMS actuator\" width=\"300\" height=\"221\" srcset=\"https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_bonded_-Mirror-300x221.jpg 300w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_bonded_-Mirror-100x74.jpg 100w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_bonded_-Mirror-275x202.jpg 275w, https:\/\/senslite.com.tw\/Home\/wp-content\/uploads\/2019\/12\/2D_MEMS_bonded_-Mirror.jpg 340w\" sizes=\"auto, (max-width: 300px) 100vw, 300px\" \/><figcaption id=\"caption-attachment-5473\" class=\"wp-caption-text\">Gimbal-less MEMS actuator<\/figcaption><\/figure>\n<p><span class=\"bold\">Bonded Mirrors<\/span> (Click on the \u2713 symbol to view a sample datasheet, PDF)<\/p>\n<p>\u00a0<\/p>\n<p>\u00a0<\/p>\n<p>\u00a0<\/p>\n<p>\u00a0<\/p>\n<div class=\"container-wrap\">\n<div class=\"container main-content\">\n<div class=\"row\">\n<div id=\"fws_615dddc04cb46\" class=\"wpb_row vc_row-fluid vc_row full-width-section standard_section   \" data-midnight=\"dark\" data-bg-mobile-hidden=\"\">\n<div class=\"col span_12 dark left\">\n<div class=\"vc_col-sm-12 wpb_column column_container vc_column_container col has-animation no-extra-padding instance-3 animated-in\" data-t-w-inherits=\"default\" data-border-radius=\"none\" data-shadow=\"none\" data-border-animation=\"\" data-border-animation-delay=\"\" data-border-width=\"none\" data-border-style=\"solid\" data-border-color=\"\" data-bg-cover=\"\" data-padding-pos=\"all\" data-has-bg-color=\"false\" data-bg-color=\"\" data-bg-opacity=\"1\" data-hover-bg=\"\" data-hover-bg-opacity=\"1\" data-animation=\"fade-in\" data-delay=\"150\">\n<div class=\"vc_column-inner\">\n<div class=\"wpb_wrapper\">\n<div id=\"\" class=\"wpb_text_column wpb_content_element \">\n<div class=\"wpb_wrapper\">\n<table id=\"tablepress-2\" class=\"tablepress tablepress-id-2\">\n<thead>\n<tr class=\"row-1 odd\">\n<th class=\"column-1\" rowspan=\"2\">Actuator Name<\/th>\n<th class=\"column-2\" rowspan=\"2\">Mechanical Angle [\u00b0]<\/th>\n<th class=\"column-3\" rowspan=\"2\">Die Size [mm]<\/th>\n<th class=\"column-4\" colspan=\"9\">Mirror Diameter [mm]<\/th>\n<\/tr>\n<tr class=\"row-2 even\">\n<th class=\"column-4\">2.0<\/th>\n<th class=\"column-5\">2.4<\/th>\n<th class=\"column-6\">3.0<\/th>\n<th class=\"column-7\">3.6<\/th>\n<th class=\"column-8\">4.2<\/th>\n<th class=\"column-9\">4.6<\/th>\n<th class=\"column-10\">5.0<\/th>\n<th class=\"column-11\">6.4<\/th>\n<th class=\"column-12\">7.5<\/th>\n<\/tr>\n<\/thead>\n<tbody class=\"row-hover\">\n<tr class=\"row-3 odd\">\n<td class=\"column-1\"><a class=\"tbhlink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b1-1\/\">A7B1.1<\/a><\/td>\n<td class=\"column-2\">\u00b17<\/td>\n<td class=\"column-3\">5.20 x 5.20<\/td>\n<td class=\"column-4\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b1-1\/2000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b1-1\/2400-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-6\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b1-1\/3000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-7\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b1-1\/3600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-8\">NR<\/td>\n<td class=\"column-9\">NR<\/td>\n<td class=\"column-10\">NR<\/td>\n<td class=\"column-11\">NR<\/td>\n<td class=\"column-12\">NR<\/td>\n<\/tr>\n<tr class=\"row-4 even\">\n<td class=\"column-1\"><a class=\"tbhlink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b2-1\/\">A7B2.1<\/a><\/td>\n<td class=\"column-2\">\u00b15.5<\/td>\n<td class=\"column-3\">5.20 x 5.20<\/td>\n<td class=\"column-4\">NR<\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b2-1\/2400-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-6\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b2-1\/3000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-7\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a7b2-1\/3600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-8\">NR<\/td>\n<td class=\"column-9\">NR<\/td>\n<td class=\"column-10\">NR<\/td>\n<td class=\"column-11\">NR<\/td>\n<td class=\"column-12\">NR<\/td>\n<\/tr>\n<tr class=\"row-5 odd\">\n<td class=\"column-1\"><a class=\"tbhlink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a8l2-2\/\">A8L2.2<\/a><\/td>\n<td class=\"column-2\">\u00b15<\/td>\n<td class=\"column-3\">7.25 x 7.25<\/td>\n<td class=\"column-4\">NR<\/td>\n<td class=\"column-5\">NR<\/td>\n<td class=\"column-6\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a8l2-2\/3000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-7\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a8l2-2\/3600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-8\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a8l2-2\/4200-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-9\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a8l2-2\/4600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-10\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a8l2-2\/5000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-11\">NR<\/td>\n<td class=\"column-12\">NR<\/td>\n<\/tr>\n<tr class=\"row-6 even\">\n<td class=\"column-1\"><a class=\"tbhlink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/\">A5L3.3(C2)<\/a><\/td>\n<td class=\"column-2\">\u00b14.25<\/td>\n<td class=\"column-3\">7.25 x 7.25<\/td>\n<td class=\"column-4\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/2000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/2400-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-6\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/3000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-7\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/3600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-8\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/4200-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-9\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/4600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-10\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c2\/5000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-11\">NR<\/td>\n<td class=\"column-12\">NR<\/td>\n<\/tr>\n<tr class=\"row-7 odd\">\n<td class=\"column-1\"><a class=\"tbhlink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/\">A5L3.3(C1)<\/a><\/td>\n<td class=\"column-2\">\u00b12.5<\/td>\n<td class=\"column-3\">7.25 x 7.25<\/td>\n<td class=\"column-4\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/2000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/2400-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-6\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/3000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-7\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/3600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-8\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/4200-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-9\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/a5l3-3c1-4600-mems-mirror\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-10\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/5000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-11\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l3-3_c1\/6400-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-12\">NR<\/td>\n<\/tr>\n<tr class=\"row-8 even\">\n<td class=\"column-1\"><a class=\"tbhlink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/\">A5L2.2<\/a><\/td>\n<td class=\"column-2\">\u00b11.15<\/td>\n<td class=\"column-3\">7.25 x 7.25<\/td>\n<td class=\"column-4\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/2000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-5\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/2400-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-6\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/3000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-7\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/3600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-8\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/4200-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-9\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/4600-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-10\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/5000-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-11\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/6400-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<td class=\"column-12\"><a class=\"tblink\" href=\"https:\/\/www.mirrorcletech.com\/wp\/products\/mems-mirrors\/dual\/bonded\/a5l2-2\/7500-2\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u2713<\/a><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<span class=\"tablepress-table-description tablepress-table-description-id-2\">* <b>\u237b<\/b> = Datasheet Not Available<br \/>* NR = Not Recommended<\/span><\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<h5><strong><a href=\"https:\/\/www.mirrorcletech.com\/pdf\/Mirrorcle_Products_List.pdf\">See Product Listing and Guide<\/a> (PDF Download)<\/strong><\/h5>\n\n\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\"><p>  \u201cSensLite represents Mirrorcle products in Taiwan local market only,  please contact <a href=\"mailto:memsmirror@senslite.com.tw\">memsmirror@senslite.com.tw<\/a> for inquiry in Taiwan.  <\/p><p>Please  visit <a href=\"http:\/\/www.Mirrorcletech.com\">www.Mirrorcletech.com<\/a> for other global sales.\u201d  <\/p><\/blockquote>\n","protected":false},"excerpt":{"rendered":"<p>MEMS,MEMS scanning mirror,MEMS scanner,micromirror,3D camera,structured light,MEMS LiDAR,pico projector,augmented reality,mixed reality,laser scan display,head-up display,\u5fae\u6a5f\u96fb,\u5fae\u6383\u63cf,\u6df1\u5ea6\u651d\u5f71\u6a5f,\u7d50\u69cb\u5149,\u64f4\u589e\u5be6\u5883,\u62ac\u982d\u986f\u793a\u5668,\u6fc0\u5149\u96f7\u8fbe<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-4073","page","type-page","status-publish","hentry"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages\/4073","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/comments?post=4073"}],"version-history":[{"count":84,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages\/4073\/revisions"}],"predecessor-version":[{"id":5980,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages\/4073\/revisions\/5980"}],"wp:attachment":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/media?parent=4073"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}