{"id":3604,"date":"2013-12-11T11:10:40","date_gmt":"2013-12-11T03:10:40","guid":{"rendered":"http:\/\/senslite.com.tw\/Home\/?page_id=3604"},"modified":"2018-04-26T11:57:48","modified_gmt":"2018-04-26T03:57:48","slug":"zn-diffusion-completed-epiwafer","status":"publish","type":"page","link":"https:\/\/senslite.com.tw\/Home\/index.php\/datacom\/epitaxial-wafer-epiwafer\/inp-base-epiwafer\/processed-inp-epiwafer\/zn-diffusion-completed-epiwafer\/","title":{"rendered":"Zn-diffusion completed epiwafer"},"content":{"rendered":"

2\u2019\u2019 Zn-diffusion completed epiwafer by MOVPE is available.\u00a0 Only AR coating and metallization process are needed to finish P-side chip process.<\/p>\n

Epitaxial Capability<\/b><\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u00a0Parameters<\/b><\/td>\n\u00a0Values<\/b><\/td>\n<\/tr>\n
\u00a0Thickness control<\/td>\n\u00a0Better than \u00b15%<\/td>\n<\/tr>\n
\u00a0Thickness uniformity<\/td>\n\u00a0Better than \u00b12% at the inner 40mm<\/td>\n<\/tr>\n
\u00a0N \u2013InP doping (cm-3<\/sup>)<\/td>\n\u00a0Si-doped, 1E16 to 5E17<\/td>\n<\/tr>\n
\u00a0N–<\/sup> -InP doping (cm-3<\/sup>)<\/td>\n\u00a0Si-doped, 5E15 to 1E16<\/td>\n<\/tr>\n
\u00a0P \u2013InP doping (cm-3<\/sup>)<\/td>\n\u00a0Zn-doped, >2E18<\/td>\n<\/tr>\n
\u00a0P+<\/sup> -InGaAs doping (cm-3<\/sup>)<\/td>\n\u00a0Zn-doped, >1E19<\/td>\n<\/tr>\n
\u00a0i-InGaAsP background C.C (cm-3<\/sup>)<\/td>\n\u00a0<2E15 (special requested absorption layer)<\/td>\n<\/tr>\n
\u00a0i-InGaAs background C.C. (cm-3<\/sup>)<\/td>\n\u00a0<1E15<\/td>\n<\/tr>\n
\u00a0Defect density control (Diameter)<\/td>\n\u00a0<50cm-3<\/sup>(D>10\u03bcm)<\/td>\n<\/tr>\n
\u00a0Refraction index<\/td>\n\u00a0SiO2: 1.45\u00b10.05 \/SiNx: 2.05\u00b10.1<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

 <\/p>\n

Device Performance<\/b><\/p>\n\n\n\n\n\n\n\n\n\n\n
\u00a0Parameter<\/b><\/td>\n\u00a0Symbol<\/b><\/td>\n\u00a0Typical<\/b><\/td>\n<\/tr>\n
\u00a0Dark Current @-5V<\/td>\n\n

Id<\/sub><\/p>\n<\/td>\n

\u00a0<500pA<\/td>\n<\/tr>\n
\u00a0Capacitance @-5V<\/td>\n\n

CP<\/sub><\/p>\n<\/td>\n

\u00a0<6pF<\/td>\n<\/tr>\n
\u00a0Responsivity<\/td>\n\n

Res<\/p>\n<\/td>\n

\u00a0~0.9 A\/W (With AR coating)<\/td>\n<\/tr>\n
\u00a0Break down Voltage @10\u03bcA<\/td>\n\n

VR<\/sub><\/p>\n<\/td>\n

\u00a0>-30V<\/td>\n<\/tr>\n
\u00a0Serial resistance<\/td>\n\n

Rs<\/p>\n<\/td>\n

\u00a0<40\u03a9<\/td>\n<\/tr>\n
\u00a0Good device yield<\/td>\n—<\/td>\n\u00a0>80%<\/td>\n<\/tr>\n
\u00a0Zn diffused, planar type PIN<\/td>\n\n

300 \u03bcm aperture<\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

2\u2019\u2019 Zn-diffusion completed epiwafer by MOVPE is available.\u00a0 Only AR coating and metallization process are needed to finish P-side chip process. Epitaxial Capability \u00a0Parameters \u00a0Values \u00a0Thickness control \u00a0Better than \u00b15% \u00a0Thickness uniformity \u00a0Better than \u00b12% at the inner 40mm \u00a0N \u2013InP doping (cm-3) \u00a0Si-doped, 1E16 to 5E17 \u00a0N– -InP doping (cm-3) \u00a0Si-doped, 5E15 to 1E16 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":2885,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-3604","page","type-page","status-publish","hentry"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages\/3604","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/comments?post=3604"}],"version-history":[{"count":1,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages\/3604\/revisions"}],"predecessor-version":[{"id":3605,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages\/3604\/revisions\/3605"}],"up":[{"embeddable":true,"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/pages\/2885"}],"wp:attachment":[{"href":"https:\/\/senslite.com.tw\/Home\/index.php\/wp-json\/wp\/v2\/media?parent=3604"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}