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2D MEMS Laser Scanning Module

MEMS mirror scanning modules are designed for two axis collimated laser beam (or 2D optical) scanning applications.  An optical cell built-in with MEMS mirror and laser is special design for the applications that require miniature, high speed, long-term stability, lower power consumption and low cost solution. Plug-and-play compact design is suitable for all kinds of single mode laser beam-steering applications.
2D MEMS Scanning Module
2D MEMS Scanning Module


  • MirrorcleTech Gimbal-less MEMS designed  for high speed two-axis laser beam steering
  • Large angles in point-to-point (quasi-static) or resonant  mode of operation
  • Robust compact design for long-term stability
  • Small form factor mass product ready
  • Standard laser wavelength 405nm, 450nm, 520nm, and 638nm.

(Others on request)

  • Custom-designed scanning module upon request.
  • Works with any Mirrorcle MEMS driver and MEMS controller
Scanning Module Type MEMS Package Product Code Dimension (LxWxH) (Unit: mm)
Multi-Color TO-8 EaZy3b.TT 44.8 x 21.4 x 16
Single Color LCC EaZy1b.LT 33 x 21.4 x 16
Single Color TO-8 EaZy1b.TT 32.3 x 21.4 x 16
Compact  Single Color TO-8 EaZy1c.TT.F 23 x 17.5 x 16


  • Lidar and 3D Scan
  • 3D metrology
  • Bio imaging
  • 3D tracking/Scanning
  • Laser marking
  • Free space communication
520nm Laser Scanning Module
520nm Laser Scanning Module
Compact Laser Scanning Module
Compact Laser Scanning Module
RGB Full Color Laser Scanning module
RGB Full Color Laser Scanning module